TY - GEN
T1 - Carbon-based materials as key-enabler for "more than moore"
AU - Kreupl, Franz
PY - 2011
Y1 - 2011
N2 - Carbon-based materials like nanotubes and graphene are heavily investigated as future transistor devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional transistors, the paper here will focus on some less known applications of pyrolytically deposited carbon. Proposed and demonstrated are applications in capacitors, gate materials, through-silicon vias, novel non-volatile memories, carbon-silicon Schottky diodes and sensors.
AB - Carbon-based materials like nanotubes and graphene are heavily investigated as future transistor devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional transistors, the paper here will focus on some less known applications of pyrolytically deposited carbon. Proposed and demonstrated are applications in capacitors, gate materials, through-silicon vias, novel non-volatile memories, carbon-silicon Schottky diodes and sensors.
UR - http://www.scopus.com/inward/record.url?scp=80053197567&partnerID=8YFLogxK
U2 - 10.1557/opl.2011.400
DO - 10.1557/opl.2011.400
M3 - Conference contribution
AN - SCOPUS:80053197567
SN - 9781605112800
T3 - Materials Research Society Symposium Proceedings
SP - 3
EP - 14
BT - Nanomaterials Integration for Electronics, Energy and Sensing
T2 - 2010 MRS Fall Meeting
Y2 - 29 November 2010 through 3 December 2010
ER -