Carbon-based materials as key-enabler for "more than moore"

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14 Scopus citations


Carbon-based materials like nanotubes and graphene are heavily investigated as future transistor devices and in interconnect applications. While much of the interest has been devoted to the device aspects in competition to conventional transistors, the paper here will focus on some less known applications of pyrolytically deposited carbon. Proposed and demonstrated are applications in capacitors, gate materials, through-silicon vias, novel non-volatile memories, carbon-silicon Schottky diodes and sensors.

Original languageEnglish
Title of host publicationNanomaterials Integration for Electronics, Energy and Sensing
Number of pages12
StatePublished - 2011
Externally publishedYes
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: 29 Nov 20103 Dec 2010

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2010 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA


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