Capacitance-voltage profiling of deuterium passivation and diffusion in diamond Schottky diodes

R. Zeisel, C. E. Nebel, M. Stutzmann

Research output: Contribution to journalConference articlepeer-review

16 Scopus citations

Abstract

Capacitance-voltage measurements have been performed on deuterated boron-doped natural type IIb diamond. They demonstrate the electrical passivation of the boron acceptors, which was manifested by a persistent decrease in capacitance after deuteration. Bias annealing experiments have been carried out to determine the charge state of the diffusing deuterium. The differences between annealing with or without bias lead to the conclusion that boron-deuterium complexes dissociate at about 750 K and that the released deuterium is positively charged.

Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalDiamond and Related Materials
Volume9
Issue number3
DOIs
StatePublished - 2000
Event10th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, Nitrides and Silicon Carbide - Prague, Czech Republic
Duration: 12 Sep 199917 Sep 1999

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