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Capabilities of ICP-RIE cryogenic dry etching of silicon: Review of exemplary microstructures
U. Sökmen, A. Stranz, S. Fündling, H. H. Wehmann, V. Bandalo, A. Bora, M. Tornow, A. Waag, E. Peiner
Research output: Contribution to journal › Article › peer-review
52
Scopus
citations