Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range

S. Jatta; B. Kögel; M. Maute; K. Zogal; F. Riemenschneider; G. Böhm; M. C. Amann; P. Meißner

doi:10.1109/LPT.2009.2034272

Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range

S. Jatta, B. Kögel, M. Maute, K. Zogal, F. Riemenschneider, G. Böhm, M. C. Amann, P. Meißner

Chair of Semiconductor Technology

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

A single-mode continuous tuning range of 76 nm is realized using a bulk-micromachined vertical-cavity surface-emitting laser (VCSEL) operating at wavelengths around 1.55 μm. The bulk-micromachined upper mirror is optimized for dielectric material and manufactured separately from the half-VCSEL. The VCSEL is tuned by an electrothermal actuation of a concave bended membrane. The tuning range characteristics in dependence on the bias of the VCSEL are investigated. It is determined that the tuning range saturates by increasing the current of the VCSEL and a further increase causes a multimode behavior within the tuning range.

Original language	English
Article number	5290154
Pages (from-to)	1822-1824
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	21
Issue number	24
DOIs	https://doi.org/10.1109/LPT.2009.2034272
State	Published - Dec 2009

Keywords

Bulk-micromachined
Dielectric
Microelectromechanical systems (MEMS)
Microoptoelectromechanical system (MOEMS)
Semiconductor laser
Tunable vertical-cavity surface-emitting laser (VCSEL)

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10.1109/LPT.2009.2034272

Cite this

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title = "Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range",

abstract = "A single-mode continuous tuning range of 76 nm is realized using a bulk-micromachined vertical-cavity surface-emitting laser (VCSEL) operating at wavelengths around 1.55 μm. The bulk-micromachined upper mirror is optimized for dielectric material and manufactured separately from the half-VCSEL. The VCSEL is tuned by an electrothermal actuation of a concave bended membrane. The tuning range characteristics in dependence on the bias of the VCSEL are investigated. It is determined that the tuning range saturates by increasing the current of the VCSEL and a further increase causes a multimode behavior within the tuning range.",

keywords = "Bulk-micromachined, Dielectric, Microelectromechanical systems (MEMS), Microoptoelectromechanical system (MOEMS), Semiconductor laser, Tunable vertical-cavity surface-emitting laser (VCSEL)",

author = "S. Jatta and B. K{\"o}gel and M. Maute and K. Zogal and F. Riemenschneider and G. B{\"o}hm and Amann, {M. C.} and P. Mei{\ss}ner",

year = "2009",

month = dec,

doi = "10.1109/LPT.2009.2034272",

language = "English",

volume = "21",

pages = "1822--1824",

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T1 - Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range

AU - Jatta, S.

AU - Kögel, B.

AU - Maute, M.

AU - Zogal, K.

AU - Riemenschneider, F.

AU - Böhm, G.

AU - Amann, M. C.

AU - Meißner, P.

PY - 2009/12

Y1 - 2009/12

N2 - A single-mode continuous tuning range of 76 nm is realized using a bulk-micromachined vertical-cavity surface-emitting laser (VCSEL) operating at wavelengths around 1.55 μm. The bulk-micromachined upper mirror is optimized for dielectric material and manufactured separately from the half-VCSEL. The VCSEL is tuned by an electrothermal actuation of a concave bended membrane. The tuning range characteristics in dependence on the bias of the VCSEL are investigated. It is determined that the tuning range saturates by increasing the current of the VCSEL and a further increase causes a multimode behavior within the tuning range.

AB - A single-mode continuous tuning range of 76 nm is realized using a bulk-micromachined vertical-cavity surface-emitting laser (VCSEL) operating at wavelengths around 1.55 μm. The bulk-micromachined upper mirror is optimized for dielectric material and manufactured separately from the half-VCSEL. The VCSEL is tuned by an electrothermal actuation of a concave bended membrane. The tuning range characteristics in dependence on the bias of the VCSEL are investigated. It is determined that the tuning range saturates by increasing the current of the VCSEL and a further increase causes a multimode behavior within the tuning range.

KW - Bulk-micromachined

KW - Dielectric

KW - Microelectromechanical systems (MEMS)

KW - Microoptoelectromechanical system (MOEMS)

KW - Semiconductor laser

KW - Tunable vertical-cavity surface-emitting laser (VCSEL)

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JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

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M1 - 5290154

ER -

Bulk-micromachined VCSEL At 1.55 μm With 76-nm single-mode continuous tuning range

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Keywords

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