Broadband RF-MEMS based SPDT

Sergio DiNardo, Paola Farinelli, Flavio Giacomozzi, Giovanni Mannocchi, Romolo Marcelli, Benno Margesin, Paolo Mezzanotte, Viviana Mulloni, Peter Russer, Roberto Sorrentino, Francesco Vitulli, Larissa Vietzorreck

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

28 Scopus citations


A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

Original languageEnglish
Title of host publicationProceedings of the 36th European Microwave Conference, EuMC 2006
PublisherIEEE Computer Society
Number of pages4
ISBN (Print)2960055160, 9782960055160
StatePublished - 2006
Event36th European Microwave Conference, EuMC 2006 - Manchester, United Kingdom
Duration: 10 Sep 200612 Sep 2006

Publication series

NameProceedings of the 36th European Microwave Conference, EuMC 2006


Conference36th European Microwave Conference, EuMC 2006
Country/TerritoryUnited Kingdom


  • Coplanar waveguides
  • Micro-electromechanical devices
  • Micromachining
  • Passive circuits
  • Switches


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