Broadband RF-MEMS based SPDT

Sergio DiNardo; Paola Farinelli; Flavio Giacomozzi; Giovanni Mannocchi; Romolo Marcelli; Benno Margesin; Paolo Mezzanotte; Viviana Mulloni; Peter Russer; Roberto Sorrentino; Francesco Vitulli; Larissa Vietzorreck

doi:10.1109/EUMC.2006.281475

Broadband RF-MEMS based SPDT

Sergio DiNardo, Paola Farinelli, Flavio Giacomozzi, Giovanni Mannocchi, Romolo Marcelli, Benno Margesin, Paolo Mezzanotte, Viviana Mulloni, Peter Russer, Roberto Sorrentino, Francesco Vitulli, Larissa Vietzorreck

Technical University of Munich

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

28 Scopus citations

Abstract

A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 10⁹ actuations.

Original language	English
Title of host publication	Proceedings of the 36th European Microwave Conference, EuMC 2006
Publisher	IEEE Computer Society
Pages	1727-1730
Number of pages	4
ISBN (Print)	2960055160, 9782960055160
DOIs	https://doi.org/10.1109/EUMC.2006.281475
State	Published - 2006
Event	36th European Microwave Conference, EuMC 2006 - Manchester, United Kingdom Duration: 10 Sep 2006 → 12 Sep 2006

Publication series

Name	Proceedings of the 36th European Microwave Conference, EuMC 2006

Conference

Conference	36th European Microwave Conference, EuMC 2006
Country/Territory	United Kingdom
City	Manchester
Period	10/09/06 → 12/09/06

Keywords

Coplanar waveguides
Micro-electromechanical devices
Micromachining
Passive circuits
Switches

Access to Document

10.1109/EUMC.2006.281475

Cite this

DiNardo, S., Farinelli, P., Giacomozzi, F., Mannocchi, G., Marcelli, R., Margesin, B., Mezzanotte, P., Mulloni, V., Russer, P., Sorrentino, R., Vitulli, F., & Vietzorreck, L. (2006). Broadband RF-MEMS based SPDT. In Proceedings of the 36th European Microwave Conference, EuMC 2006 (pp. 1727-1730). Article 4058184 (Proceedings of the 36th European Microwave Conference, EuMC 2006). IEEE Computer Society. https://doi.org/10.1109/EUMC.2006.281475

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title = "Broadband RF-MEMS based SPDT",

abstract = "A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.",

keywords = "Coplanar waveguides, Micro-electromechanical devices, Micromachining, Passive circuits, Switches",

author = "Sergio DiNardo and Paola Farinelli and Flavio Giacomozzi and Giovanni Mannocchi and Romolo Marcelli and Benno Margesin and Paolo Mezzanotte and Viviana Mulloni and Peter Russer and Roberto Sorrentino and Francesco Vitulli and Larissa Vietzorreck",

year = "2006",

doi = "10.1109/EUMC.2006.281475",

language = "English",

isbn = "2960055160",

series = "Proceedings of the 36th European Microwave Conference, EuMC 2006",

publisher = "IEEE Computer Society",

pages = "1727--1730",

booktitle = "Proceedings of the 36th European Microwave Conference, EuMC 2006",

note = "36th European Microwave Conference, EuMC 2006 ; Conference date: 10-09-2006 Through 12-09-2006",

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DiNardo, S, Farinelli, P, Giacomozzi, F, Mannocchi, G, Marcelli, R, Margesin, B, Mezzanotte, P, Mulloni, V, Russer, P, Sorrentino, R, Vitulli, F & Vietzorreck, L 2006, Broadband RF-MEMS based SPDT. in Proceedings of the 36th European Microwave Conference, EuMC 2006., 4058184, Proceedings of the 36th European Microwave Conference, EuMC 2006, IEEE Computer Society, pp. 1727-1730, 36th European Microwave Conference, EuMC 2006, Manchester, United Kingdom, 10/09/06. https://doi.org/10.1109/EUMC.2006.281475

Broadband RF-MEMS based SPDT. / DiNardo, Sergio; Farinelli, Paola; Giacomozzi, Flavio et al.
Proceedings of the 36th European Microwave Conference, EuMC 2006. IEEE Computer Society, 2006. p. 1727-1730 4058184 (Proceedings of the 36th European Microwave Conference, EuMC 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Broadband RF-MEMS based SPDT

AU - DiNardo, Sergio

AU - Farinelli, Paola

AU - Giacomozzi, Flavio

AU - Mannocchi, Giovanni

AU - Marcelli, Romolo

AU - Margesin, Benno

AU - Mezzanotte, Paolo

AU - Mulloni, Viviana

AU - Russer, Peter

AU - Sorrentino, Roberto

AU - Vitulli, Francesco

AU - Vietzorreck, Larissa

PY - 2006

Y1 - 2006

N2 - A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

AB - A broadband single pole double throw (SPDT) switch has been developed for use in the range of 0 to 30 GHz. The switch consists of a cascade of a MEMS ohmic series and a capacitive shunt switch with floating electrode in each branch. It is manufactured on high-resistive silicon using surface micro-machining technology. The SPDT switch provides an insertion loss better than -0.6 dB, return loss smaller than -20dB, and isolation better than -40 dB in nearly the whole band. A switching voltage around 50 V is needed. The switch is used as a building block for more complex switching networks. The fabrication process is described and the measured RF-performances are reported and discussed. A failure analysis exhibits a lifetime up to 109 actuations.

KW - Coplanar waveguides

KW - Micro-electromechanical devices

KW - Micromachining

KW - Passive circuits

KW - Switches

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T3 - Proceedings of the 36th European Microwave Conference, EuMC 2006

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BT - Proceedings of the 36th European Microwave Conference, EuMC 2006

PB - IEEE Computer Society

T2 - 36th European Microwave Conference, EuMC 2006

Y2 - 10 September 2006 through 12 September 2006

ER -

Broadband RF-MEMS based SPDT

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Keywords

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