Broadband and Efficient Second-Harmonic Generation from a Hybrid Dielectric Metasurface/Semiconductor Quantum-Well Structure

A prominent nonlinear optical phenomenon that is extensively studied using nanostructured materials is second-harmonic generation (SHG) as it has applications in various fields. Achieving efficient SHG from a nanostructure requires a large second-order nonlinear susceptibility of the material system and large electromagnetic fields. For practical applications, the nanostructures should also have low losses, high damage thresholds, large bandwidths, wavelength scalability, dual mode operation in transmission and reflection, monolithic integrability, and ease of fabrication. While various approaches have demonstrated efficient SHG, to the best of our knowledge, none have demonstrated all these desired qualities simultaneously. Here, we present a hybrid approach for realizing efficient SHG in an ultrathin dielectric-semiconductor nonlinear device with all the above-mentioned desired properties. Our approach uses high quality factor leaky mode resonances in dielectric metasurfaces that are coupled to intersubband transitions of semiconductor quantum wells. Using our device, we demonstrate SHG at pump wavelengths ranging from 8.5 to 11 μm, with a maximum second-harmonic nonlinear conversion factor of 1.1 mW/W² and maximum second-harmonic conversion efficiency of 2.5 × 10^-5 at modest pump intensities of 10 kW/cm². Our results open a new direction for designing low loss, broadband, and efficient ultrathin nonlinear optical devices.