Abstract
Boron-hydrogen complexes and the diffusion of hydrogen in boron-doped silicon are analyzed by means of Raman-scattering and infrared-reflection spectroscopies. At temperatures lower than 200°C, the hydrogen diffusion is controlled by a trapping at the acceptor sites, which becomes negligible at higher temperatures. Changes in the zone-center optical phonon of silicon and in the vibrational local modes of boron occur after hydrogen passivation. H and B local modes are studied as a function of temperature and external uniaxial stress. The analysis of the H-vibrational modes under stress reveals a nontrigonal symmetry of B-H complexes at 100 K, and a high mobility of hydrogen in these complexes. Our results are compared with different models proposed in the literature. We find that they are compatible with a bond-minimum site for hydrogen at low temperatures; however, under stress and at high temperatures, off-bond positions of H are proposed. We also analyze the stability of the boron-hydrogen complexes, and deduce a dissociation energy of 0.6 eV.
| Original language | English |
|---|---|
| Pages (from-to) | 1555-1575 |
| Number of pages | 21 |
| Journal | Physical Review B |
| Volume | 43 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1991 |
| Externally published | Yes |
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