Abstract
We have developed a new biochemical sensor principle based on interface biochemistry using a film bulk acoustic wave oscillator. Excellent resolution of more than 0.1 ng/μm 2 is demonstrated. The system is highly suitable for pharmaceutical or health care applications like protein body/anti-body or DNA hybridization detection.
Original language | English |
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Pages (from-to) | 992-994 |
Number of pages | 3 |
Journal | Technical Digest - International Electron Devices Meeting |
State | Published - 2003 |
Externally published | Yes |
Event | IEEE International Electron Devices Meeting - Washington, DC, United States Duration: 8 Dec 2003 → 10 Dec 2003 |