Biochemical sensors based on bulk acoustic wave resonators

R. Brederlow, S. Zauner, A. L. Scholtz, K. Aufinger, W. Simbürger, C. Paulus, A. Martin, M. Fritz, H. J. Timme, H. Heiss, S. Marksteiner, L. Elbrecht, R. Aigner, R. Thewes

Research output: Contribution to journalConference articlepeer-review

21 Scopus citations


We have developed a new biochemical sensor principle based on interface biochemistry using a film bulk acoustic wave oscillator. Excellent resolution of more than 0.1 ng/μm 2 is demonstrated. The system is highly suitable for pharmaceutical or health care applications like protein body/anti-body or DNA hybridization detection.

Original languageEnglish
Pages (from-to)992-994
Number of pages3
JournalTechnical Digest - International Electron Devices Meeting
StatePublished - 2003
Externally publishedYes
EventIEEE International Electron Devices Meeting - Washington, DC, United States
Duration: 8 Dec 200310 Dec 2003


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