TY - GEN
T1 - Automatically generated and experimentally validated system-level model of a microelectromechanical RF switch
AU - Niessner, M.
AU - Schrag, G.
AU - Wachutka, G.
AU - Iannacci, J.
AU - Margesin, B.
PY - 2009
Y1 - 2009
N2 - We present a computationally efficient multi-energy domain coupled system-level model of an electrostatically actuated RF MEMS switch exposed to squeeze film damping. The physically-based model is systematically derived and calibrated on the basis of a hierarchical modeling approach. The model shows excellent agreement with measurements. Especially coupling effects, that are the increased damping and the spring softening whilst actuation, are correctly reproduced by the model. This demonstrates the power of our modeling approach and, in particular, the predictiveness w.r.t. "real world" experiments. Furthermore, the automatically generated model is suitable for direct implementation into standard circuit simulators.
AB - We present a computationally efficient multi-energy domain coupled system-level model of an electrostatically actuated RF MEMS switch exposed to squeeze film damping. The physically-based model is systematically derived and calibrated on the basis of a hierarchical modeling approach. The model shows excellent agreement with measurements. Especially coupling effects, that are the increased damping and the spring softening whilst actuation, are correctly reproduced by the model. This demonstrates the power of our modeling approach and, in particular, the predictiveness w.r.t. "real world" experiments. Furthermore, the automatically generated model is suitable for direct implementation into standard circuit simulators.
KW - Macromodeling
KW - Mixed-level simulation
KW - Multi-energy domain coupling
KW - RF MEMS switch
UR - http://www.scopus.com/inward/record.url?scp=77958045261&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:77958045261
SN - 9781439817834
SN - 9781439817841
T3 - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
SP - 655
EP - 658
BT - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
T2 - Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
Y2 - 3 May 2009 through 7 May 2009
ER -