Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones

Keyphrases

• Reduced Order Model 100%
• Physically-based 100%
• Automated Extraction 100%
• Multi-energy Domain 100%
• Capacitive MEMS Microphone 100%
• Network Approach 50%
• Complex Geometry 50%
• Equivalent Network 50%
• Simulation Approach 50%
• Macromodel 50%
• Microstructure 50%
• Automated Generation 50%
• Circuit Simulator 50%
• Predictive Simulation 50%
• MATLAB Toolbox 50%
• Standard Circuit 50%
• VHDL-AMS 50%
• Mixed-level 50%
• Mixed-level Simulation 50%
• High Efficiency 50%

Engineering

• Capacitive 100%
• Reduced Order Model 100%
• Microelectromechanical System 100%
• Equivalent Network 50%
• Discretization 50%

Material Science

• Microelectromechanical System 100%
• Electronic Circuit 50%