@inproceedings{a2e5547a32af440abf4a904e80b6ab8f,
title = "Automated, deep reactive ion etching free fiber coupling to nanophotonic devices",
abstract = "Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is 1.2±0.4 μm, the average shift caused by mating < 0.5 μm, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is < 0.2 μm. From these values the expected overall alignment offset is calculated as 1.4 ± 0.4 μm. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.",
keywords = "DRIE, Fiber coupling, Fiber-to-chip, Interconnection, QD, SNSPD, SSPD",
author = "Fabian Flassig and Rasmus Flaschmann and Thomas Kainz and Sven Ernst and Stefan Strohauer and Christian Schmid and Lucio Zugliani and Kai M{\"u}ller and Finley, {Jonathan J.}",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE.; Quantum Sensing and Nano Electronics and Photonics XVIII 2022 ; Conference date: 20-02-2022 Through 24-02-2022",
year = "2022",
doi = "10.1117/12.2611160",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Manijeh Razeghi and Khodaparast, {Giti A.} and Vitiello, {Miriam S.}",
booktitle = "Quantum Sensing and Nano Electronics and Photonics XVIII",
}