Automated, deep reactive ion etching free fiber coupling to nanophotonic devices

Fabian Flassig, Rasmus Flaschmann, Thomas Kainz, Sven Ernst, Stefan Strohauer, Christian Schmid, Lucio Zugliani, Kai Müller, Jonathan J. Finley

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Rapid development in integrated optoelectronic devices and quantum photonic architectures creates a need for optical fiber to chip coupling with low losses. Here we present a fast and generic approach that allows temperature stable self-aligning connections of nanophotonic devices to optical fibers. We show that the attainable precision of our approach is equal to that of DRIE-process based couplings. Specifically, the initial alignment precision is 1.2±0.4 μm, the average shift caused by mating < 0.5 μm, which is in the order of the precision of the concentricity of the employed fiber, and the thermal cycling stability is < 0.2 μm. From these values the expected overall alignment offset is calculated as 1.4 ± 0.4 μm. These results show that our process offers an easy to implement, versatile, robust and DRIE-free method for coupling photonic devices to optical fibers. It can be fully automated and is therefore scalable for coupling to novel devices for quantum photonic systems.

Original languageEnglish
Title of host publicationQuantum Sensing and Nano Electronics and Photonics XVIII
EditorsManijeh Razeghi, Giti A. Khodaparast, Miriam S. Vitiello
PublisherSPIE
ISBN (Electronic)9781510648890
DOIs
StatePublished - 2022
EventQuantum Sensing and Nano Electronics and Photonics XVIII 2022 - Virtual, Online
Duration: 20 Feb 202224 Feb 2022

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12009
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceQuantum Sensing and Nano Electronics and Photonics XVIII 2022
CityVirtual, Online
Period20/02/2224/02/22

Keywords

  • DRIE
  • Fiber coupling
  • Fiber-to-chip
  • Interconnection
  • QD
  • SNSPD
  • SSPD

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