Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors

J. Provine, Peter Schindler, Jan Torgersen, Hyo Jin Kim, Hans Peter Karnthaler, Fritz B. Prinz

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Fingerprint

Dive into the research topics of 'Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering

Chemical Engineering