@inproceedings{8278bfd351df4468835fc6326f469191,
title = "Atomic force microscope based nanomanipulator for mechanical and optical lithography",
abstract = "An atomic force microscope (AFM) based system has been built for the manipulation of materials at the nanometer scale. The AFM is combined with an inverse optical microscope and an UV-laser microbeam system for photoablation. The actuators of the AFM are controlled using a digital signal processor. Real-time routines and a graphical user interface have been programmed for high resolution imaging and nanomanipulation. The nanomanipulation can be pre-programmed off-line or directly performed using a low-cost haptic interface. In this paper we discuss the whole system and the different methods for manipulation.",
keywords = "Actuators, Atomic force microscopy, Laser ablation, Lithography, Manipulators, Nanotechnology",
author = "Rubio-Sierra, {F. J.} and S. Burghardt and A. Kempe and Heckl, {W. M.} and Stark, {R. W.}",
year = "2004",
language = "English",
isbn = "0780385365",
series = "2004 4th IEEE Conference on Nanotechnology",
pages = "468--470",
booktitle = "2004 4th IEEE Conference on Nanotechnology",
note = "2004 4th IEEE Conference on Nanotechnology ; Conference date: 16-08-2004 Through 19-08-2004",
}