Are there charged dangling bonds in device quality amorphous silicon?

M. S. Brandt, A. Asano, M. Stutzmann

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

17 Scopus citations

Abstract

We discuss the possible existence of a considerable density of charged dangling bond defects in device-quality hydrogenated amorphous silicon, which for example has been postulated by recent thermal equilibrium models for the density-of-states distribution. Based on a quantitative analysis of spin resonance and light-induced spin resonance data at different temperatures as well as on subgap absorption measurements, we conclude that intrinsic a-Si:H only has a small density of charged defects caused by unintentional impurity doping. The same conclusion also holds for light-soaked a-Si:H and for samples which are dehydrogenated by annealing at high temperatures.

Original languageEnglish
Title of host publicationAmorphous Silicon Technology
PublisherPubl by Materials Research Society
Pages201-206
Number of pages6
ISBN (Print)155899193X, 9781558991934
DOIs
StatePublished - 1993
Externally publishedYes
EventProceedings of the MRS Spring Meeting - San Francisco, CA, USA
Duration: 13 Apr 199316 Apr 1993

Publication series

NameMaterials Research Society Symposium Proceedings
Volume297
ISSN (Print)0272-9172

Conference

ConferenceProceedings of the MRS Spring Meeting
CitySan Francisco, CA, USA
Period13/04/9316/04/93

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