TY - GEN
T1 - Are there charged dangling bonds in device quality amorphous silicon?
AU - Brandt, M. S.
AU - Asano, A.
AU - Stutzmann, M.
PY - 1993
Y1 - 1993
N2 - We discuss the possible existence of a considerable density of charged dangling bond defects in device-quality hydrogenated amorphous silicon, which for example has been postulated by recent thermal equilibrium models for the density-of-states distribution. Based on a quantitative analysis of spin resonance and light-induced spin resonance data at different temperatures as well as on subgap absorption measurements, we conclude that intrinsic a-Si:H only has a small density of charged defects caused by unintentional impurity doping. The same conclusion also holds for light-soaked a-Si:H and for samples which are dehydrogenated by annealing at high temperatures.
AB - We discuss the possible existence of a considerable density of charged dangling bond defects in device-quality hydrogenated amorphous silicon, which for example has been postulated by recent thermal equilibrium models for the density-of-states distribution. Based on a quantitative analysis of spin resonance and light-induced spin resonance data at different temperatures as well as on subgap absorption measurements, we conclude that intrinsic a-Si:H only has a small density of charged defects caused by unintentional impurity doping. The same conclusion also holds for light-soaked a-Si:H and for samples which are dehydrogenated by annealing at high temperatures.
UR - http://www.scopus.com/inward/record.url?scp=0027801939&partnerID=8YFLogxK
U2 - 10.1557/proc-297-201
DO - 10.1557/proc-297-201
M3 - Conference contribution
AN - SCOPUS:0027801939
SN - 155899193X
SN - 9781558991934
T3 - Materials Research Society Symposium Proceedings
SP - 201
EP - 206
BT - Amorphous Silicon Technology
PB - Publ by Materials Research Society
T2 - Proceedings of the MRS Spring Meeting
Y2 - 13 April 1993 through 16 April 1993
ER -