TY - GEN
T1 - Analysis of leaky surface acoustic wave reflections
AU - Meier, H.
AU - Russer, P.
PY - 1993
Y1 - 1993
N2 - An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated with the generation of evanescent and propagating bulk modes have to be included. The reflection coefficient and the phase velocity shift are directly calculated from the dispersion relation and are analyzed for open and short circuited electrodes, different metallization ratios, and normalized metal electrode thicknesses, respectively. Numerical and experimental results for the single electrode reflection coefficient are given for aluminum electrodes on 36rot YX LiTaO3 substrate.
AB - An accurate understanding of the reflection behavior of leaky surface acoustic waves (LSAW) is of particular interest in order to develop sophisticated computer aided design (CAD) tools. Thus, we have analyzed the propagation and reflection characteristic of LSAW under periodic metal grating structures. The electrically and mechanically induced reflections, as well as the anisotropy of the substrate material, are rigorously taken into account. Consequently, the second order effects associated with the generation of evanescent and propagating bulk modes have to be included. The reflection coefficient and the phase velocity shift are directly calculated from the dispersion relation and are analyzed for open and short circuited electrodes, different metallization ratios, and normalized metal electrode thicknesses, respectively. Numerical and experimental results for the single electrode reflection coefficient are given for aluminum electrodes on 36rot YX LiTaO3 substrate.
UR - http://www.scopus.com/inward/record.url?scp=0027754280&partnerID=8YFLogxK
U2 - 10.1109/ultsym.1993.339678
DO - 10.1109/ultsym.1993.339678
M3 - Conference contribution
AN - SCOPUS:0027754280
SN - 0780312783
SN - 9780780312784
T3 - Proceedings of the IEEE Ultrasonics Symposium
SP - 201
EP - 204
BT - Proceedings of the IEEE Ultrasonics Symposium
PB - Publ by IEEE
T2 - Proceedings of the IEEE 1993 Ultrasonics Symposium. Part 1 (of 2)
Y2 - 31 October 1993 through 3 November 1993
ER -