AlGaN-based ultraviolet light detectors with integrated optical filters

Uwe Karrer; Armin Dobner; Oliver Ambacher; Martin Stutzmann

doi:10.1116/1.591272

AlGaN-based ultraviolet light detectors with integrated optical filters

Uwe Karrer, Armin Dobner, Oliver Ambacher, Martin Stutzmann

TUM Emeriti of Excellence

Walter Schottky Institut

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

AlGaN-based photoconductors with high photoresponse in a narrow spectral range can be realized by a combination of three epitaxial AlGaN layers with different alloy composition are demonstrated. The films are grown on top of each other by molecular beam epitaxy (MBE) and act as optical filter, isolator, and detector layers, respectively. Experimental results on structural properties, spectral response, intensity, and voltage dependent responsiveness at distinct wavelength as well as the photocurrent decay are presented.

Original language	English
Pages (from-to)	757-760
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	2
DOIs	https://doi.org/10.1116/1.591272
State	Published - Mar 2000

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abstract = "AlGaN-based photoconductors with high photoresponse in a narrow spectral range can be realized by a combination of three epitaxial AlGaN layers with different alloy composition are demonstrated. The films are grown on top of each other by molecular beam epitaxy (MBE) and act as optical filter, isolator, and detector layers, respectively. Experimental results on structural properties, spectral response, intensity, and voltage dependent responsiveness at distinct wavelength as well as the photocurrent decay are presented.",

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AU - Dobner, Armin

AU - Ambacher, Oliver

AU - Stutzmann, Martin

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AB - AlGaN-based photoconductors with high photoresponse in a narrow spectral range can be realized by a combination of three epitaxial AlGaN layers with different alloy composition are demonstrated. The films are grown on top of each other by molecular beam epitaxy (MBE) and act as optical filter, isolator, and detector layers, respectively. Experimental results on structural properties, spectral response, intensity, and voltage dependent responsiveness at distinct wavelength as well as the photocurrent decay are presented.

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ER -

AlGaN-based ultraviolet light detectors with integrated optical filters

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