AlGaN-based ultraviolet light detectors with integrated optical filters

Uwe Karrer, Armin Dobner, Oliver Ambacher, Martin Stutzmann

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


AlGaN-based photoconductors with high photoresponse in a narrow spectral range can be realized by a combination of three epitaxial AlGaN layers with different alloy composition are demonstrated. The films are grown on top of each other by molecular beam epitaxy (MBE) and act as optical filter, isolator, and detector layers, respectively. Experimental results on structural properties, spectral response, intensity, and voltage dependent responsiveness at distinct wavelength as well as the photocurrent decay are presented.

Original languageEnglish
Pages (from-to)757-760
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
StatePublished - Mar 2000


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