TY - JOUR
T1 - Absence of a Crystal Direction Regime in which Sputtering Corresponds to Amorphous Material
AU - Schlueter, K.
AU - Nordlund, K.
AU - Hobler, G.
AU - Balden, M.
AU - Granberg, F.
AU - Flinck, O.
AU - Da Silva, T. F.
AU - Neu, R.
N1 - Publisher Copyright:
© 2020 authors. Published by the American Physical Society. Published by the American Physical Society under the terms of the "https://creativecommons.org/licenses/by/4.0/"Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI. Open access publication funded by the Max Planck Society.
PY - 2020/11/23
Y1 - 2020/11/23
N2 - Erosion of material by energetic ions, i.e., sputtering, is widely used in industry and research. Using experiments and simulations that, independently of each other, obtain the sputter yield of thousands of individual grains, we demonstrate here that the sputter yield for heavy keV ions on metals changes as a continuous function of the crystal direction. Moreover, we show that polycrystalline metals with randomly oriented grains do not sputter with the same yield as the amorphous material. The key reason for this is attributed to linear collision sequences rather than channeling.
AB - Erosion of material by energetic ions, i.e., sputtering, is widely used in industry and research. Using experiments and simulations that, independently of each other, obtain the sputter yield of thousands of individual grains, we demonstrate here that the sputter yield for heavy keV ions on metals changes as a continuous function of the crystal direction. Moreover, we show that polycrystalline metals with randomly oriented grains do not sputter with the same yield as the amorphous material. The key reason for this is attributed to linear collision sequences rather than channeling.
UR - http://www.scopus.com/inward/record.url?scp=85097321581&partnerID=8YFLogxK
U2 - 10.1103/PhysRevLett.125.225502
DO - 10.1103/PhysRevLett.125.225502
M3 - Article
C2 - 33315424
AN - SCOPUS:85097321581
SN - 0031-9007
VL - 125
JO - Physical Review Letters
JF - Physical Review Letters
IS - 22
M1 - 225502
ER -