A Physics-Based Interpolation Method for Rapid Dimensioning of pMUT Designs

Aleksander Bajt, Gabriele Bosetti, Prajith Kumar Poongodan, Gabriele Schrag, Frank Vanselow

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we present an interpolation method based on analytical physics-based equations aimed towards rapid prototyping of fluid-operated piezoelectrical micromachined ultrasonic transducers (pMUTs). The method allows for the definition of design variants, whose natural frequencies match the targeted operating frequency, within a predefined geometrical parameter range. Among those designs, an optimal design w.r.t the largest transmitting sensitivity can be determined. Comparison between FEM simulations and interpolation results shows a maximum relative error of 2.96% for the resonant frequency matching. Due to generic and physics-based concept, this methodology is easily transferable to the target-based optimization of any arbitrary pMUT geometry and operating media.

Original languageEnglish
Title of host publication2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665458368
DOIs
StatePublished - 2022
Event23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022 - St Julian, Malta
Duration: 25 Apr 202227 Apr 2022

Publication series

Name2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022

Conference

Conference23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2022
Country/TerritoryMalta
CitySt Julian
Period25/04/2227/04/22

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