A novel silicon 'star-comb' microphone concept for enhanced signal-to-noise-ratio: Modeling, design and first prototype

Johannes Manz, Gabriele Bosetti, Alfons Dehe, Gabriele Schrag

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

A novel comb-structure-based, capacitive MEMS microphone concept is proposed, which is expected to significantly reduce viscous damping losses, challenging the high performance of conventional MEMS microphones. To this end, we derived a dedicated, fully energy-coupled and properly calibrated system-level model scaling with all relevant design parameters. It enables to discriminate in detail the impact of the individual components like transducer, package and electrostatic read out to the overall signal-to-noise-ratio (SNR) of the microphone and hence, to identify the optimal design of the device. Measurements of first prototypes show promising results and agree very well with simulations demonstrating the predictive power of the model w.r.t. to further optimization.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages67-70
Number of pages4
ISBN (Electronic)9781538627310
DOIs
StatePublished - 26 Jul 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Silicon microphone
  • comb structure
  • modeling
  • noise
  • signal-to-noise-ratio (SNR)
  • system simulation

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