A Novel High-SNR Full Bandwidth Piezoelectric MEMS Microphone Based on a Fully Clamped Aluminum Nitride Corrugated Membrane
- Gabriele Bosetti
- , Christian Bretthauer
- , Andreas Bogner
- , Michael Krenzer
- , Karolina Gierl
- , Hans Joerg Timme
- , Heinrich Heiss
- , Gabriele Schrag
- Technical University of Munich
- Infineon Technologies AG
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
10
Scopus
citations