A novel approach for the preparation of metal oxide/CNTs composites for sensing applications

G. Neri, A. Bonavita, G. Micali, G. Rizzo, M. G. Willinger, E. Rauwel, N. Pinna

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

In this report we describe the preparation of metal oxide coated-carbon nanotubes (MeOx/CNTs) with a controlled thickness of the inorganic coating by a new atomic layer deposition (ALD) process based on non-aqueous sol-gel reactions. The as deposited films are amorphous and the coatings on the inside and outside the nanotube present a high conformality. The electrical and sensing properties of thin films of VOx-coated carbon nanotubes prepared by ALD have been investigated. The developed VOx/CNTs-based sensor devices show enhanced performance for NO2 monitoring compared to uncoated CNTs-based sensors.

Original languageEnglish
Title of host publicationSensors and Microsystems - AISEM 2009 Proceedings
Pages63-66
Number of pages4
DOIs
StatePublished - 2010
Externally publishedYes
Event14th Italian Conference on Sensors and Microsystems, AISEM 2009 - Pavia, Italy
Duration: 24 Feb 200926 Feb 2009

Publication series

NameLecture Notes in Electrical Engineering
Volume54 LNEE
ISSN (Print)1876-1100
ISSN (Electronic)1876-1119

Conference

Conference14th Italian Conference on Sensors and Microsystems, AISEM 2009
Country/TerritoryItaly
CityPavia
Period24/02/0926/02/09

Fingerprint

Dive into the research topics of 'A novel approach for the preparation of metal oxide/CNTs composites for sensing applications'. Together they form a unique fingerprint.

Cite this