A Method for Accurate Modeling of BAW Filters at High Power Levels

Andreas Tag, Vikrant Chauhan, Christian Huck, Bernhard Bader, Dominik Karolewski, F. Maximilian Pitschi, Robert Weigel, Amelie Hagelauer

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

A novel approach for multiphysics modeling of bulk acoustic wave (BAW) filters is presented allowing accurate and at the same time efficient modeling of BAW filters at high power levels. The approach takes the different types of losses and their spatial distribution into account in order to provide the required input for thermal simulation. The temperature distribution determined by thermal simulation is used to modify the geometry and the layer stack of each single resonator of the filter. In this way, the required input for modeling of electromagnetic (EM) and acoustic behavior at high power level is generated. The high accuracy of the modeling approach is verified by the measurements of the S-parameters and the temperature distribution by infrared thermography during high-power loads. Moreover, the influence of the nonlinear behavior on the frequency shift of the resonance frequency is investigated. For this purpose, a parameterized nonlinear Mason model has been combined with a 3-D EM finite-element method and the required nonlinear material parameters were determined by fitting simulation results to the measured polyharmonic distortion model (X-parameters) of a BAW resonator.

Original languageEnglish
Article number7582546
Pages (from-to)2207-2214
Number of pages8
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume63
Issue number12
DOIs
StatePublished - Dec 2016
Externally publishedYes

Keywords

  • Acoustic devices
  • BAW filters
  • BAW resonators
  • bulk acoustic waves (BAWs)
  • electromagnetic modeling
  • film bulk acoustic resonators
  • infrared imaging
  • microelectromechanical devices
  • microwave measurement
  • modeling
  • power dissipation
  • radio frequency thermal management
  • resonator filters

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