A fully coupled FEM model of electromechanically acutated MEMS with squeeze film damping

Keyphrases

• Frequency Behavior 100%
• Microsystems 100%
• Squeeze Film Damping 100%
• Coupled BEM-FEM 100%
• Fluid Damping 100%
• Contact Model 50%
• Air Damping 50%
• Transient Behavior 50%
• Specific Types 50%
• Microswitch 50%
• Eigenfrequency 50%
• Mechanical Contact 50%
• Tangent Matrix 50%
• Damped Motion 50%
• RF MEMS Switch 50%
• Zero Frequency 50%
• Damping Model 50%
• Nonlinear Reynolds Equation 50%
• MEMS Resonator 50%

Engineering

• Finite Element Modeling 100%
• Microelectromechanical System 100%
• Frequency Behavior 40%
• Microsystem 40%
• Resonator 20%
• Reynolds' Equation 20%
• Contact Model 20%
• Zero Frequency 20%
• Damped Motion 20%