A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution

Umidjon Nurmetov; Tobias Fritz; Ernst Mullner; Christopher Dougherty; Franz Kreupl; Ralf Brederlow

doi:10.23919/VLSIC.2019.8778132

A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution

Umidjon Nurmetov
, Tobias Fritz
, Ernst Mullner
, Christopher Dougherty
, Franz Kreupl
, Ralf Brederlow

Associate Professorship of Hybrid Electronic Systems

Technical University of Munich
Texas Instrumets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.

Original language	English
Title of host publication	2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	C64-C65
ISBN (Electronic)	9784863487185
DOIs	https://doi.org/10.23919/VLSIC.2019.8778132
State	Published - Jun 2019
Event	33rd IEEE Symposium on VLSI Circuits, VLSIC 2018 - Kyoto, Japan Duration: 9 Jun 2019 → 14 Jun 2019

Publication series

Name	IEEE Symposium on VLSI Circuits, Digest of Technical Papers
Volume	2019-June
ISSN (Print)	2158-5601
ISSN (Electronic)	2158-5636

Conference

Conference	33rd IEEE Symposium on VLSI Circuits, VLSIC 2018
Country/Territory	Japan
City	Kyoto
Period	9/06/19 → 14/06/19

Access to Document

10.23919/VLSIC.2019.8778132

Cite this

Nurmetov, U., Fritz, T., Mullner, E., Dougherty, C., Kreupl, F., & Brederlow, R. (2019). A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution. In 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers (pp. C64-C65). Article 8778132 (IEEE Symposium on VLSI Circuits, Digest of Technical Papers; Vol. 2019-June). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/VLSIC.2019.8778132

Nurmetov, Umidjon ; Fritz, Tobias ; Mullner, Ernst et al. / A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution. 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. pp. C64-C65 (IEEE Symposium on VLSI Circuits, Digest of Technical Papers).

@inproceedings{c1636b18713a4f3d9e0549b9db9a268a,

title = "A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution",

abstract = "An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.",

author = "Umidjon Nurmetov and Tobias Fritz and Ernst Mullner and Christopher Dougherty and Franz Kreupl and Ralf Brederlow",

note = "Publisher Copyright: {\textcopyright} 2019 JSAP.; 33rd IEEE Symposium on VLSI Circuits, VLSIC 2018 ; Conference date: 09-06-2019 Through 14-06-2019",

year = "2019",

month = jun,

doi = "10.23919/VLSIC.2019.8778132",

language = "English",

series = "IEEE Symposium on VLSI Circuits, Digest of Technical Papers",

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Nurmetov, U, Fritz, T, Mullner, E, Dougherty, C, Kreupl, F & Brederlow, R 2019, A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution. in 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers., 8778132, IEEE Symposium on VLSI Circuits, Digest of Technical Papers, vol. 2019-June, Institute of Electrical and Electronics Engineers Inc., pp. C64-C65, 33rd IEEE Symposium on VLSI Circuits, VLSIC 2018, Kyoto, Japan, 9/06/19. https://doi.org/10.23919/VLSIC.2019.8778132

A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution. / Nurmetov, Umidjon; Fritz, Tobias; Mullner, Ernst et al.
2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2019. p. C64-C65 8778132 (IEEE Symposium on VLSI Circuits, Digest of Technical Papers; Vol. 2019-June).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Brederlow, Ralf

PY - 2019/6

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AB - An integrated 11-bit 2-D CMOS stress sensor is presented with 66dB of dynamic range, measuring -100 to 360MPa, and < 1LSB error over temperature from 5°C to 90°C. N-Well-based primary elements enable accurate sensing of stress magnitude and angle, and allow repeatable error compensation.

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M3 - Conference contribution

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BT - 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

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Nurmetov U, Fritz T, Mullner E, Dougherty C, Kreupl F , Brederlow R. A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution. In 2019 Symposium on VLSI Circuits, VLSI Circuits 2019 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2019. p. C64-C65. 8778132. (IEEE Symposium on VLSI Circuits, Digest of Technical Papers). doi: 10.23919/VLSIC.2019.8778132

A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution

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