70 GHz Integrated Silicon Oscillator

J. Buechler, P. Russer, E. Kasper, J. F. Luy, K. M. Strohm

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Planar oscillators on highly insulating silicon substrate with a disc resonator were fabricated. The active element was an IMPATT diode made from SI MBE material. A maximum CW output power of 200 mW with an efficiency of 4.5% at 73 GHz has been obtained.

Original languageEnglish
Pages (from-to)977-978
Number of pages2
JournalElectronics Letters
Volume24
Issue number15
DOIs
StatePublished - 1988

Keywords

  • IMPATTS
  • Microwave oscillators
  • Oscillators
  • Semiconductor devices and materials

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