1D ZnO nano-assemblies by Plasma-CVD as chemical sensors for flammable and toxic gases

Davide Barreca, Daniela Bekermann, Elisabetta Comini, Anjana Devi, Roland A. Fischer, Alberto Gasparotto, Chiara MacCato, Giorgio Sberveglieri, Eugenio Tondello

Research output: Contribution to journalArticlepeer-review

184 Scopus citations

Abstract

In this work, 1D ZnO nano-assemblies were prepared on Al2O 3 substrates by plasma enhanced-chemical vapor deposition (PE-CVD), and characterized in their morphology and chemical composition by field emission-scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDXS) and X-ray photoelectron spectroscopy (XPS). For the first time, the sensing performances of PE-CVD ZnO nanosystems were tested in the detection of toxic/combustible gases (CO, H2 and CH4), revealing very good responses already at moderate working temperatures. In particular, carbon monoxide and hydrogen detection was possible already at 100 °C, whereas methane sensing required a minimum temperature of 200 °C. The performances of the present ZnO nanosystems, that make them attractive candidates for technological applications, are presented and discussed in terms of their unique and controllable morphological organization.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume149
Issue number1
DOIs
StatePublished - 6 Aug 2010
Externally publishedYes

Keywords

  • 1D nano-assemblies
  • Gas sensors
  • Plasma enhanced-chemical vapor deposition
  • ZnO

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