Keyphrases
System-level Model
25%
RF MEMS Switch
25%
Microsystems
23%
System Modeling
22%
Fluidics
18%
Mixed-level
17%
Microphone
17%
Micropump
16%
Physically-based
16%
Microdevice
15%
Modeling Approach
15%
Electrostatically Actuated
14%
Silicon Microphone
14%
Mixed-level Simulation
13%
Squeeze Film Damping
13%
Predictive Simulation
12%
Finite Element Simulation
12%
MEMS Microphone
11%
Micro-electro-mechanical Systems
11%
Physics-based
11%
MEMS Transducer
10%
Macromodel
10%
Multi-energy Domain
10%
Damping Effect
10%
System Level
10%
Energy Domain
9%
FEM Simulation
9%
Micromechanics
9%
Gas Sensor
9%
Undulation
9%
Compact Model
8%
System-level Simulation
8%
Flapper
8%
Actuator
8%
Full System
8%
Fluidic Damping
8%
Microstructure
8%
Level Model
8%
Acoustics
8%
Damping Model
8%
Design Parameters
7%
Viscous Damping
7%
Reduced Order Model
7%
Characterization Techniques
7%
MEMS Devices
7%
Pressure Dependence
7%
Complex Geometry
7%
Photoacoustic
7%
Capacitive MEMS Microphone
7%
Medical Applications
7%
Engineering
Microelectromechanical System
100%
Level Model
39%
Fluidics
34%
Actuator
29%
Capacitive
27%
Microsystem
23%
Transducer
22%
Piezoelectric
21%
Micropump
18%
Damping Effect
15%
Ultrasonics
14%
Finite Element Simulation
13%
Transients
10%
Signal-to-Noise Ratio
10%
Gas Sensor
10%
Model System
9%
Macromodel
9%
Finite Element Modeling
9%
Design Parameter
8%
Computational Expense
8%
Reduced Order Model
8%
Electronic Circuitry
8%
Fluid Flow
7%
Medical Applications
7%
Actuation
6%
Nitride
6%
Intrinsic Stress
6%
Frequency Response
6%
Q Factor
6%
Design Optimization
5%
Figure of Merit
5%
System Operation
5%
Harvester
5%
Electric Field
5%
