Zinc malonate based precursors for MOCVD of ZnO

D. Bekermann, D. Pilard, R. A. Fischer, A. Devi

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

5 Zitate (Scopus)

Abstract

This work deals with the development of alternative metal organic precursor compounds for the growth of zinc oxide by MOCVD. In this regard we focused on fluorine-free zinc complexes using chelating ligands. A series of Bis(malonato)zinc(II) complexes was synthesized and characterized by elemental analysis (EA), mass spectrometry (MS), proton and carbon NMR spectroscopy. The precursor properties were investigated by solubility and sublimation studies, differential thermal analysis (DTA) and thermogravimetry (TG). Density Functional Theory (DFT) studies were performed to investigate the influence of the ligand environment on the heat of formation of the precursors and their reactivity towards humidity.

OriginalspracheEnglisch
TitelECS Transactions - EuroCVD 17/CVD 17
Seiten601-608
Seitenumfang8
Auflage8 PART 1
DOIs
PublikationsstatusVeröffentlicht - 2009
Extern publiziertJa
Veranstaltung17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Österreich
Dauer: 4 Okt. 20099 Okt. 2009

Publikationsreihe

NameECS Transactions
Nummer8 PART 1
Band25
ISSN (Print)1938-5862
ISSN (elektronisch)1938-6737

Konferenz

Konferenz17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
Land/GebietÖsterreich
OrtVienna
Zeitraum4/10/099/10/09

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