YBa2Cu3O7-x deposition of large moving plates for continuous processing

Ch Hoffmann; A. Lümkemann; U. Schmatz; M. Bauer; R. Metzger; P. Berberich; H. Kinder

doi:10.1109/TASC.2003.812030

YBa₂Cu₃O_7-x deposition of large moving plates for continuous processing

Ch Hoffmann
, A. Lümkemann
, U. Schmatz
, M. Bauer
, R. Metzger
, P. Berberich
, H. Kinder

Department Physics

Technische Universität München

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

5 Zitate (Scopus)

Abstract

YBa₂Cu₃O_7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (J_c) over 3 MA/cm² were achieved while on 10 cm × 20 cm sapphire substrates a J_c of 2.2 MA/cm² could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm² and 1.5 MA/cm² on IBAD buffered metal tapes.

Originalsprache	Englisch
Seiten (von - bis)	2879-2881
Seitenumfang	3
Fachzeitschrift	IEEE Transactions on Applied Superconductivity
Jahrgang	13
Ausgabenummer	2
DOIs	https://doi.org/10.1109/TASC.2003.812030
Publikationsstatus	Veröffentlicht - Juni 2003

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10.1109/TASC.2003.812030

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title = "YBa2Cu3O7-x deposition of large moving plates for continuous processing",

abstract = "YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm {\texttimes} 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm {\texttimes} 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.",

keywords = "Co-evaporation, Thin films, YBCO",

author = "Ch Hoffmann and A. L{\"u}mkemann and U. Schmatz and M. Bauer and R. Metzger and P. Berberich and H. Kinder",

note = "Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universit{\"a}t M{\"u}nchen, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030",

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T1 - YBa2Cu3O7-x deposition of large moving plates for continuous processing

AU - Hoffmann, Ch

AU - Lümkemann, A.

AU - Schmatz, U.

AU - Bauer, M.

AU - Metzger, R.

AU - Berberich, P.

AU - Kinder, H.

N1 - Funding Information: Manuscript received August 9, 2002. This work was supported by the BMBF. The authors are with the Physikdepartment E10, Technische Universität München, Munich, Germany (e-mail: [email protected]). Digital Object Identifier 10.1109/TASC.2003.812030

PY - 2003/6

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N2 - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

AB - YBa2Cu3O7-x thin films can be deposited on substrates up to 20 cm × 20 cm using thermal reactive co-evaporation with a linear reciprocating oxygen pocket. In order to coat larger area or in a continuous way, the substrate has to be moved through the deposition zone. Therefore, the substrate is fixed in a slide and shuttled by a transport system. On small samples critical current densities (Jc) over 3 MA/cm2 were achieved while on 10 cm × 20 cm sapphire substrates a Jc of 2.2 MA/cm2 could be reached. On ion-beam-assisted deposition (IBAD) buffered aluminum oxide ceramic we attain critical current densities of 1.4 MA/cm2 and 1.5 MA/cm2 on IBAD buffered metal tapes.

KW - Co-evaporation

KW - Thin films

KW - YBCO

UR - https://www.scopus.com/pages/publications/0042466494

U2 - 10.1109/TASC.2003.812030

DO - 10.1109/TASC.2003.812030

M3 - Article

AN - SCOPUS:0042466494

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EP - 2881

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

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