Tuning the feature size of nanoimprinting stamps: A method to enhance the flexibility of nanoimprint lithography

Keyphrases

• Stamping 100%
• Nanoimprint Lithography 100%
• Nanoimprint 100%
• Chromium 20%
• Tuning Methods 20%
• Nanometer Resolution 20%
• Silicon Dioxide 20%
• Nanoislands 20%
• Plasmonic Resonance 20%
• Hydrofluoric Acid 10%
• Size-dependent Properties 10%
• Experimental Configuration 10%
• Reactive Ion Etching 10%
• Reproduction Method 10%
• Isotropic Etching 10%
• Hard Mask 10%
• Metal Nanoislands 10%
• Resonance Wavelength 10%
• Gold Nanoislands 10%

Engineering

• Feature Size 100%
• Nanoimprint Lithography 100%
• Nanometre 50%
• Plasmonics 50%
• Silicon Dioxide 50%
• Dependent Property 25%
• Good Agreement 25%
• Lithography 25%
• Etching Process 25%
• Resonance Wavelength 25%
• Prototype 25%

Material Science

• Silicon Dioxide 100%
• Chromium 100%
• Lithography 100%
• Reactive Ion Etching 50%