@inproceedings{a5860bfc7f7f4d3fa13a0a2938f3afec,
title = "Stroboscopic Video Microscopy for In-Plane Motion Measurements up to 2 MHz with Picometer Resolution",
abstract = "We present a setup for measuring in-plane motion of MEMS with picometer resolution. The system uses stroboscopic video microscopy to capture image sequences from periodic motions that are analyzed with gradient-based sub-pixel algorithms.The performance of the setup was demonstrated by measuring the frequency response along the length of an atomic-force cantilever and a dense mapping of the strain field on the surface of a flexoelectric MEMS device.Results demonstrate the superiority of our system compared to previous systems: 50 pm noise floor in single-shot experiments and frequency range up to 2 MHz.",
keywords = "MEMS, in-plane, motion estimation, stroboscopic, video microscopy",
author = "Andrej Voss and Lars Seyfert and Werner Hemmert",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 ; Conference date: 25-01-2021 Through 29-01-2021",
year = "2021",
month = jan,
day = "25",
doi = "10.1109/MEMS51782.2021.9375327",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1040--1043",
booktitle = "34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021",
}