@inproceedings{fc70caaf168c45b3b0ea532b293d7967,
title = "Silicon based multi parametric biohybrid microsensor chips",
abstract = "The Heinz Nixdorf-Lehrstuhl f{\"u}r Medizinische Elekronik at Technische Universit{\"a}t M{\"u}nchen has developed silicon based biosensor chips for monitoring activities of cell cultures, which combine the thin-film bio sensors with those based on semiconductor technology. The O2/ISFET sensors (ion-sensitive field-effect transistor) and the pn temperature diode use the semiconductor properties of the silicon substrate, while the amperometric sensor and the IDES (integrated elec-trode structures) were realized on the surface of the silicon wafer using platinum structures. These perform dissolved oxygen concentration measurement, pH measurement, imped-ance measurement and temperature measurement, integrated on the same chip.",
keywords = "Cellular respiration, ISFET, O-FET, Silicon biosensors, pH",
author = "Y. Eminaǧa and J. Wiest and M. Remm and M. Brischwein and B. Wolf",
year = "2009",
doi = "10.1007/978-3-642-03887-7-86",
language = "English",
isbn = "9783642038860",
series = "IFMBE Proceedings",
number = "8",
pages = "299--302",
booktitle = "World Congress on Medical Physics and Biomedical Engineering",
edition = "8",
note = "World Congress on Medical Physics and Biomedical Engineering: Micro- and Nanosystems in Medicine, Active Implants, Biosensors ; Conference date: 07-09-2009 Through 12-09-2009",
}