SESES: a comprehensive MEMS modelling system

J. G. Korvink; J. Funk; M. Roos; G. Wachutka; H. Baltes

SESES: a comprehensive MEMS modelling system

J. G. Korvink
, J. Funk
, M. Roos
, G. Wachutka
, H. Baltes

ETH Zurich

Publikation: Beitrag in Buch/Bericht/Konferenzband › Konferenzbeitrag › Begutachtung

11 Zitate (Scopus)

Abstract

We report recent advances made in building an integrated MEMS CAD modelling system using the framework of SESES [Korvink93]. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation.

Originalsprache	Englisch
Titel	An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
Herausgeber (Verlag)	Publ by IEEE
Seiten	22-27
Seitenumfang	6
ISBN (Print)	078031834X
Publikationsstatus	Veröffentlicht - 1994
Extern publiziert	Ja
Veranstaltung	Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Dauer: 25 Jan. 1994 → 28 Jan. 1994

Konferenz

Konferenz	Proceedings of the IEEE Micro Electro Mechanical Systems
Ort	Oiso, Jpn
Zeitraum	25/01/94 → 28/01/94

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title = "SESES: a comprehensive MEMS modelling system",

abstract = "We report recent advances made in building an integrated MEMS CAD modelling system using the framework of SESES [Korvink93]. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation.",

author = "Korvink, \{J. G.\} and J. Funk and M. Roos and G. Wachutka and H. Baltes",

year = "1994",

language = "English",

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pages = "22--27",

booktitle = "An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems",

publisher = "Publ by IEEE",

note = "Proceedings of the IEEE Micro Electro Mechanical Systems ; Conference date: 25-01-1994 Through 28-01-1994",

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T2 - Proceedings of the IEEE Micro Electro Mechanical Systems

AU - Korvink, J. G.

AU - Funk, J.

AU - Roos, M.

AU - Wachutka, G.

AU - Baltes, H.

PY - 1994

Y1 - 1994

N2 - We report recent advances made in building an integrated MEMS CAD modelling system using the framework of SESES [Korvink93]. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation.

AB - We report recent advances made in building an integrated MEMS CAD modelling system using the framework of SESES [Korvink93]. It provides flexible coupling of electrical, thermal and mechanical deformation phenomena in a uniform and consistent environment. The system is tailored to the specific requirements of MEMS design. SESES achieves excellent computational accuracy and efficiency on engineering workstations using an automatic mesh adaptation algorithm in 2 and 3 dimensions and a super-fast linear solver. Near-optimal data structures enable meshes of ca. 100 000 finite elements to be solved on a workstation.

UR - https://www.scopus.com/pages/publications/0027989014

M3 - Conference contribution

AN - SCOPUS:0027989014

SN - 078031834X

SP - 22

EP - 27

BT - An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems

PB - Publ by IEEE

Y2 - 25 January 1994 through 28 January 1994

ER -

SESES: a comprehensive MEMS modelling system

Abstract

Konferenz

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