@inproceedings{fbfd11e075294bc0aa22c0bfc90b6567,
title = "Rapid prototyping of biocompatible sensor chips by picoseconds laser structuring of a platinum/ tantalum pentoxide thin film layer system",
abstract = "Sensor chips to measure electrical signals of living cells are patterned with lasers from thin films of platinum (200 - 400 nm thick) as the conductive layer and tantalum pentoxide ( 100-300 nm thick) as the isolating layer. The selective ablations of the transparent tantalum pentoxide alone as well as the complete removal of both layers were investigated using picosecond laser pulses at different fluences. Ablation threshold values were measured for the irradiation either from the layer (front) side or from the glass (back) side. We observed complete and selective laser ablation of the films at low laser fluences.",
keywords = "Biocompatible chip, Laser structuring, Picoseconds laser ablation, Rapid prototyping",
author = "Gerhard Heise and Daniel Trappendreher and Florian Ilchmann and Weiss, {Robin S.} and Bernhard Wolf and Huber, {Heinz P.}",
year = "2012",
doi = "10.1117/12.908495",
language = "English",
isbn = "9780819488909",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Frontiers in Ultrafast Optics",
note = "Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII ; Conference date: 22-01-2012 Through 25-01-2012",
}