TY - JOUR
T1 - Properties of hydrogenated amorphous silicon suboxide alloys with visible room-temperature photoluminescence
AU - Zacharias, M.
AU - Dimova-Malinovska, D.
AU - Stutzmann, M.
PY - 1996/5
Y1 - 1996/5
N2 - A systematic investigation of hydrogenated amorphous substoichiometric silicon oxide films (a-SiOx: H) is presented. The a-SiOx: H films were prepared by dc magnetron sputtering and were subsequently annealed at temperatures ranging from 300 to 900°C. No formation of nanocrystals is detectable either with X-ray diffraction or with Raman scattering under any annealing conditions. The infrared spectra of the alloys are studied in detail. The SiOx films show visible photoluminescence (PL) at room temperature similar in spectral shape to that seen for porous silicon. The PL intensity increases upon annealing up to 500°C before decreasing at higher temperatures. A correlation between the luminescence intensity at 700 nm and an infrared absorption band at 880cm−1 is found. The assignment of this absorption band at 880cm−1 has been clearified as partially oxygen related via hydrogen-deuterium exchange. Optically detected magnetic resonance reveals the existence of triplet excitons with a dipolar radius of 4–5 Å which is associated with the radiative state giving rise to visible luminescence.
AB - A systematic investigation of hydrogenated amorphous substoichiometric silicon oxide films (a-SiOx: H) is presented. The a-SiOx: H films were prepared by dc magnetron sputtering and were subsequently annealed at temperatures ranging from 300 to 900°C. No formation of nanocrystals is detectable either with X-ray diffraction or with Raman scattering under any annealing conditions. The infrared spectra of the alloys are studied in detail. The SiOx films show visible photoluminescence (PL) at room temperature similar in spectral shape to that seen for porous silicon. The PL intensity increases upon annealing up to 500°C before decreasing at higher temperatures. A correlation between the luminescence intensity at 700 nm and an infrared absorption band at 880cm−1 is found. The assignment of this absorption band at 880cm−1 has been clearified as partially oxygen related via hydrogen-deuterium exchange. Optically detected magnetic resonance reveals the existence of triplet excitons with a dipolar radius of 4–5 Å which is associated with the radiative state giving rise to visible luminescence.
UR - http://www.scopus.com/inward/record.url?scp=0001320401&partnerID=8YFLogxK
U2 - 10.1080/13642819608239154
DO - 10.1080/13642819608239154
M3 - Article
AN - SCOPUS:0001320401
SN - 1364-2812
VL - 73
SP - 799
EP - 816
JO - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
JF - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
IS - 5
ER -