Picosecond laser structuring of thin film platinum layers covered with tantalum pentoxide isolation

Keyphrases

• Platinum Layers 100%
• Platinum Film 100%
• Tantalum Pentafluoride 100%
• Picosecond Laser Structuring 100%
• Glass Substrate 40%
• Layer's System 40%
• Laser Fluence 40%
• Front Surface 40%
• Ablation Threshold 40%
• Ablation Phenomenon 40%
• Biocompatibility 20%
• Irradiation 20%
• Thin Film Layers 20%
• Film Thickness 20%
• Ps Pulse 20%
• Conductive Layer 20%
• Sensor chip 20%
• Complete Removal 20%
• Pulse Duration 20%
• Ultrashort Laser Pulses 20%
• Physical Mechanism 20%
• Selective Ablation 20%
• Side-illumination 20%
• Contact Pads 20%

Engineering

• Picosecond Laser 100%
• Laser Structuring 100%
• Thin Films 100%
• Conductive 66%
• Front Side 66%
• Ablation Threshold 66%
• Laser Fluence 66%
• Ablation Phenomenon 66%
• Glass Substrate 66%
• Sensor Chip 33%
• Short Pulse Laser 33%
• Film Layer 33%
• Pulse Duration 33%