Physically based modeling of squeeze film damping by mixed-level system simulation

Publikation: Beitrag in FachzeitschriftKonferenzartikelBegutachtung

65 Zitate (Scopus)


We propose a mixed-level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of these effects in system-level models of entire microsystems. Our treatment of SQFD follows a natural physically based and flexible methodology, which also allows for complex geometries and coupling between different energy and signal domains. The proposed damping model is realized in VHDL-AMS and, therefore, can easily be included in system-level models for full system simulation. Results obtained for elementary and complex microstructures show excellent agreement with 3D Navier-Stokes-based FEM simulations, but are computationally by far less expensive, thus proving the quality and power of our approach.

Seiten (von - bis)193-200
FachzeitschriftSensors and Actuators, A: Physical
PublikationsstatusVeröffentlicht - 1 Apr. 2002
VeranstaltungTransducers'01 Eurosensors XV - Munich, Deutschland
Dauer: 10 Juni 200114 Juni 2001


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