@inproceedings{4410eb1570ff4f2e81d2f22efe0192e1,
title = "Non-aqueous atomic layer deposition of SnO2 for gas sensing application",
abstract = "Tin dioxide thin films are grown at low-moderate temperature using a non-hydrolytic atomic layer deposition process. Granular SnO2 thin films are obtained from tin(TV) tetra-butoxide reacting with acetic acid, at temperatures as low as 75 °C. Influence of pulse length of both reactants and of the deposition temperature on the saturation is studied. A narrow ALD window is established between 150 and 175 CC with a growth per cycle of 0.07 nm and with a linear growth as a function of the number of cycles. Above 200 °C decomposition of the tin precursor is not negligible. Microstructure and morphology of the as-prepared films as well as the influence of the deposition parameters are investigated using electron and atomic force microscopies. The band gap of the obtained films is determined using UV-visible spectroscopy. Finally the use of the SnO2 coated carbon nanotubes as gas sensing layer is discussed.",
author = "C. Marichy and Silva, {R. M.} and N. Pinna and Willinger, {M. G.} and N. Donato and G. Neri",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting ; Conference date: 30-09-2018 Through 04-10-2018",
year = "2018",
doi = "10.1149/08606.0055ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "6",
pages = "55--65",
editor = "Fred Roozeboom and {De Gendt}, Stefan and Elam, {Jeffrey W.} and Jolien Dendooven and {Van Der Straten}, Oscar and Chanyuan Liu and Andrea Illiberi",
booktitle = "ECS Transactions",
edition = "6",
}