TY - GEN
T1 - Noise Reduction for Sub-Nanometer Position Stability in High Dynamic Linear Drives
AU - Markl, Markus
AU - Hagl, Rainer
AU - Heldwein, Marcelo
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - High accuracy and high acceleration are initially contradictory requirements for servo drives. Especially for production machines in the semiconductor industry, both dynamics and accuracy are particularly important. In this paper, a motion controller for a linear direct drive is optimized as a whole system. The correlation between dynamics and position stability is shown. Due to the availability of inverters based on wide-bandgap semiconductors as well as high-speed analog-to-digital converters with 18 bit resolution, additional options for control loop design exist. A design approach is presented to decrease position noise with high control loop bandwidth. Based on the theoretical considerations, a standstill position stability of 20 pm is achieved on a test stand with a high-dynamic linear drive using a PWM frequency of 100 kHz.
AB - High accuracy and high acceleration are initially contradictory requirements for servo drives. Especially for production machines in the semiconductor industry, both dynamics and accuracy are particularly important. In this paper, a motion controller for a linear direct drive is optimized as a whole system. The correlation between dynamics and position stability is shown. Due to the availability of inverters based on wide-bandgap semiconductors as well as high-speed analog-to-digital converters with 18 bit resolution, additional options for control loop design exist. A design approach is presented to decrease position noise with high control loop bandwidth. Based on the theoretical considerations, a standstill position stability of 20 pm is achieved on a test stand with a high-dynamic linear drive using a PWM frequency of 100 kHz.
KW - Noise reduction
KW - accuracy
KW - high-dynamic controls
KW - linear drive
UR - http://www.scopus.com/inward/record.url?scp=85178026782&partnerID=8YFLogxK
U2 - 10.1109/LDIA59564.2023.10297519
DO - 10.1109/LDIA59564.2023.10297519
M3 - Conference contribution
AN - SCOPUS:85178026782
T3 - 2023 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023
BT - 2023 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023
Y2 - 28 June 2023 through 30 June 2023
ER -