Nano-structured micropatterns by combination of block copolymer self-assembly and UV photolithography

Keyphrases

• Nanostructures 100%
• Block Copolymer Self-assembly 100%
• Micropatterning 100%
• UV Photolithography 100%
• Periodic Pattern 50%
• Irradiation 50%
• Nano-objects 50%
• Hybrid Structure 50%
• Self-assembled Monolayer 50%
• Plasma Treatment 50%
• Metal Precursor 50%
• Block Copolymer Micelles 50%
• Precursor Salt 50%
• Solvent Production 50%
• Aperiodic Patterns 50%
• Metal Hybrid 50%
• Photopatterning 50%
• UV Photos 50%
• Photochemical Modification 50%
• Good Control 50%
• Metal Nanodot 50%

Material Science

• Block Copolymer 100%
• Self Assembly 100%
• Micelle 66%
• Monolayers 66%
• Transition Metal 33%
• Self Assembled Monolayer 33%
• Nanodots 33%
• Surface (Surface Science) 33%

Chemical Engineering

• Block Copolymer 100%
• Transition Metal 33%