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n-Type doping of diamond by sulfur and phosphorus
E. Gheeraert
, N. Casanova
, A. Tajani
, A. Deneuville
, E. Bustarret
, J. A. Garrido
, C. E. Nebel
,
M. Stutzmann
TUM Emeriti of Excellence
Institut NÉEL
Walter Schottky Institut
Publikation
:
Beitrag in Fachzeitschrift
›
Artikel
›
Begutachtung
65
Zitate (Scopus)
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Keyphrases
Phosphorus
100%
Sulfur
100%
Diamond
100%
Diamond Thin Films
50%
Temperature Measurement
25%
Phosphine
25%
Electrical Properties
25%
Gas Phase
25%
Boron Atom
25%
Two-peak
25%
Activation Energy
25%
Light Illumination
25%
Property Change
25%
Doped Films
25%
Undoped
25%
Raman Scattering
25%
Reactant Gas
25%
(111)-oriented
25%
Sulfur-doped
25%
Light Green
25%
Secondary Electron Microscopy
25%
Synthetic Forms
25%
Homoepitaxy
25%
Gray Color
25%
Diamond Film
25%
Doped Diamond
25%
Compensated Semiconductors
25%
Infrared Signature
25%
Photoelectrical Properties
25%
Physics
Thin Films
100%
Conductance
100%
Activation Energy
50%
Vapor Phase
50%
Raman Spectra
50%
Electron Microscopy
50%
Diamond Films
50%
Green Light
50%
Earth and Planetary Sciences
Thin Films
100%
Raman Spectra
50%
Diamond Films
50%
Infrared Signature
50%
Vapor Phase
50%
Electron Microscopy
50%
Absorption
50%
Chemistry
Doping
100%
Fourier Transform Infrared Spectroscopy
33%
Boron Atom
33%
Atomic Force Microscopy
33%
Reaction Activation Energy
33%
Light Green
33%
Electron Microscopy
33%
Illumination
33%
Raman Spectra
33%
Material Science
Diamond
100%
Film
40%
Thin Films
40%
Boron
20%
Electron Microscopy
20%
Activation Energy
20%
Homoepitaxy
20%
Diamond Films
20%
Surface (Surface Science)
20%
Engineering
Diamond
100%
Thin Films
33%
Resistive
16%
Gas-Phase
16%
Reactant
16%
Activation Energy
16%
Secondary Electrons
16%
Raman Spectra
16%