Moiré interferometry formulas for hard X-ray wavefront sensing

Timm Weitkamp; Ana Diaz; Bernd Nöhammer; Franz Pfeiffer; Marco Stampanoni; Eric Ziegler; Christian David

doi:10.1117/12.559695

Moiré interferometry formulas for hard X-ray wavefront sensing

Timm Weitkamp, Ana Diaz, Bernd Nöhammer, Franz Pfeiffer, Marco Stampanoni, Eric Ziegler, Christian David

Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Begutachtung

17 Zitate (Scopus)

Abstract

We derive mathematical relations for hard X-ray moiré wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moiré fringes.

Originalsprache	Englisch
Aufsatznummer	20
Seiten (von - bis)	140-144
Seitenumfang	5
Fachzeitschrift	Proceedings of SPIE - The International Society for Optical Engineering
Jahrgang	5533
DOIs	https://doi.org/10.1117/12.559695
Publikationsstatus	Veröffentlicht - 2004
Extern publiziert	Ja
Veranstaltung	Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Denver, CO, USA/Vereinigte Staaten Dauer: 5 Aug. 2004 → 5 Aug. 2004

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title = "Moir{\'e} interferometry formulas for hard X-ray wavefront sensing",

abstract = "We derive mathematical relations for hard X-ray moir{\'e} wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moir{\'e} fringes.",

keywords = "Mirror metrology, Moir{\'e} interferometry, Synchrotron radiation, X-ray interferometry, X-ray optics",

author = "Timm Weitkamp and Ana Diaz and Bernd N{\"o}hammer and Franz Pfeiffer and Marco Stampanoni and Eric Ziegler and Christian David",

year = "2004",

doi = "10.1117/12.559695",

language = "English",

volume = "5533",

pages = "140--144",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II ; Conference date: 05-08-2004 Through 05-08-2004",

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T1 - Moiré interferometry formulas for hard X-ray wavefront sensing

AU - Weitkamp, Timm

AU - Diaz, Ana

AU - Nöhammer, Bernd

AU - Pfeiffer, Franz

AU - Stampanoni, Marco

AU - Ziegler, Eric

AU - David, Christian

PY - 2004

Y1 - 2004

N2 - We derive mathematical relations for hard X-ray moiré wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moiré fringes.

AB - We derive mathematical relations for hard X-ray moiré wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moiré fringes.

KW - Mirror metrology

KW - Moiré interferometry

KW - Synchrotron radiation

KW - X-ray interferometry

KW - X-ray optics

UR - http://www.scopus.com/inward/record.url?scp=15744383377&partnerID=8YFLogxK

U2 - 10.1117/12.559695

DO - 10.1117/12.559695

M3 - Conference article

AN - SCOPUS:15744383377

SN - 0277-786X

VL - 5533

SP - 140

EP - 144

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 20

T2 - Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II

Y2 - 5 August 2004 through 5 August 2004

ER -

Moiré interferometry formulas for hard X-ray wavefront sensing

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