Modeling, fabrication and characterization of a high-performance micropump

M. Herz, D. Horsch, R. Storch, M. Wackerle, T. Lueth, M. Richter

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

3 Zitate (Scopus)

Abstract

In this paper, the design and fabrication of a multi-material high-performance micropump is presented. Exceptional flow rates of 90 ml/min were achieved by appropriate design optimization. Manufacturing steps such as laser welding and hot embossing were successfully realized and provide a robust and scalable production technique for the micropump. Characterization of the pump demonstrated high repeatability of the air flow rate as well as long life. Analytical modeling successfully predicts the behaviour of the pump with regard to inertial effects.

OriginalspracheEnglisch
TitelMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Seiten1083-1086
Seitenumfang4
DOIs
PublikationsstatusVeröffentlicht - 2010
Veranstaltung23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Dauer: 24 Jan. 201028 Jan. 2010

Publikationsreihe

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Konferenz

Konferenz23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Land/GebietChina
OrtHong Kong
Zeitraum24/01/1028/01/10

Fingerprint

Untersuchen Sie die Forschungsthemen von „Modeling, fabrication and characterization of a high-performance micropump“. Zusammen bilden sie einen einzigartigen Fingerprint.

Dieses zitieren