Abstract
A new method is proposed for a significant reduction of series resistance and device heating in long wavelength vertical-cavity surface-emitting lasers (VCSELs) based on InP. Our technique involves a twofold epitaxial growth with a buried low-resistance (3 × 10-6 Ωcm2) tunnel junction. The substitution of high-resistive p-type confining layers by low-resistive n-type material results in total resistances smaller 100 Ω even for the case of non-conducting dielectric mirrors. With the application of buried tunnel junctions in a VCSEL-structure, we could demonstrate small electrical series resistance (U < 1 V at 3 kAcm-2) and effective current confinement simultaneously. Furthermore, because of the laterally varying cavity length, an effective lateral waveguiding effect occurs.
Originalsprache | Englisch |
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Seiten (von - bis) | 1727-1729 |
Seitenumfang | 3 |
Fachzeitschrift | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Jahrgang | 39 |
Ausgabenummer | 4 A |
DOIs | |
Publikationsstatus | Veröffentlicht - 2000 |