Long-term investigations of RF-MEMS switches on failure mechanisms induced by dielectric charging

Regine Behielt, Thomas Künzig, Gabriele Schrag

Publikation: Beitrag in Buch/Bericht/KonferenzbandKonferenzbeitragBegutachtung

Abstract

We present an extensive study on dielectric charging effects, one of the major problems that limit the reliability of electrostatically actuated RF-MEMS switches and, thus, their way into a broad commercial application. For the first time, we are able to provide quantitative statements on the amount of charge injected into the dielectric layers. They result from monitoring the long-term evolution of the switching voltages of the device under test recorded by a novel, on-purpose developed measurement set-up, which enables temperature-dependent investigations. Furthermore, the origin of the parasitic charges, their impact on the switching operation and measures to remove them from the dielectric layers could be identified.

OriginalspracheEnglisch
TitelDTIP 2014 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers Inc.
ISBN (elektronisch)9782355000287
DOIs
PublikationsstatusVeröffentlicht - 9 März 2014
Veranstaltung2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014 - Cannes, Frankreich
Dauer: 2 Apr. 20144 Apr. 2014

Publikationsreihe

NameDTIP 2014 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Konferenz

Konferenz2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2014
Land/GebietFrankreich
OrtCannes
Zeitraum2/04/144/04/14

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