Initiator-free photo-cross-linkable cellulose-based resists for fabricating submicron patterns via direct laser writing

Maximilian Rothammer, Dominic T. Meier, Maximilian Maier, Georg von Freymann, Cordt Zollfrank

Publikation: Beitrag in FachzeitschriftArtikelBegutachtung

2 Zitate (Scopus)

Abstract

Novel bifunctional cellulose diacetate derivatives were synthesized in order to achieve bio-based photoresists, which can be structured by two-photon absorption via direct laser writing (DLW) without the need to use a photoinitiator. Therefore, cellulose diacetate is functionalized with thiol moieties and olefinic or methacrylic side groups enabling thiol-conjugated cross-linking. These cellulose derivatives are also photo-cross-linkable via UV irradiation (λ=254 nmand 365 nm) without using an initiator.

OriginalspracheEnglisch
Seiten (von - bis)849-855
Seitenumfang7
FachzeitschriftJournal of the Optical Society of America B: Optical Physics
Jahrgang40
Ausgabenummer4
DOIs
PublikationsstatusVeröffentlicht - Apr. 2023

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