Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

A. Lehner; G. Steinhoff; M. S. Brandt; M. Eickhoff; M. Stutzmann

doi:10.1063/1.1593223

Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

A. Lehner, G. Steinhoff, M. S. Brandt, M. Eickhoff, M. Stutzmann

TUM Emeriti of Excellence

Walter Schottky Institut

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

50 Zitate (Scopus)

Abstract

A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.

Originalsprache	Englisch
Seiten (von - bis)	2289-2294
Seitenumfang	6
Fachzeitschrift	Journal of Applied Physics
Jahrgang	94
Ausgabenummer	4
DOIs	https://doi.org/10.1063/1.1593223
Publikationsstatus	Veröffentlicht - 15 Aug. 2003

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10.1063/1.1593223

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title = "Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study",

abstract = "A study was performed on hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces. The x-ray photoelectron spectroscopy was used to analyze the resulting chemical surface structure. It was shown that the results demonstrated successful hydrosilylation on both substrate materials.",

author = "A. Lehner and G. Steinhoff and Brandt, {M. S.} and M. Eickhoff and M. Stutzmann",

year = "2003",

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T2 - A comparative x-ray photoelectron spectroscopy study

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AU - Brandt, M. S.

AU - Eickhoff, M.

AU - Stutzmann, M.

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U2 - 10.1063/1.1593223

DO - 10.1063/1.1593223

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Hydrosilylation of crystalline silicon (111) and hydrogenated amorphous silicon surfaces: A comparative x-ray photoelectron spectroscopy study

Abstract

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