Hybrid aluminum nitride integration on silicon nitride photonic circuits

Giulio Terrasanta; Manuel Müller; Timo Sommer; Matthias Althammer; Menno Poot

Hybrid aluminum nitride integration on silicon nitride photonic circuits

Giulio Terrasanta
, Manuel Müller
, Timo Sommer
, Matthias Althammer
, Menno Poot

Professur für Quantum Technologies

Technische Universität München
EPFL
Walther-Meissner-Institut
Munich Center for Quantum Science and Technology (MCQST)

Publikation: Beitrag in Fachzeitschrift › Konferenzartikel › Begutachtung

Abstract

We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.

Originalsprache	Englisch
Aufsatznummer	SF2A.2
Fachzeitschrift	Optics InfoBase Conference Papers
Publikationsstatus	Veröffentlicht - 2021
Veranstaltung	CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 - Virtual, Online, USA/Vereinigte Staaten Dauer: 9 Mai 2021 → 14 Mai 2021

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@article{023f784acb754b298cbe5847dd46848b,

title = "Hybrid aluminum nitride integration on silicon nitride photonic circuits",

abstract = "We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.",

author = "Giulio Terrasanta and Manuel M{\"u}ller and Timo Sommer and Matthias Althammer and Menno Poot",

note = "Publisher Copyright: {\textcopyright} OSA 2021, {\textcopyright} 2021 The Author(s); CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",

year = "2021",

language = "English",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

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TY - JOUR

T1 - Hybrid aluminum nitride integration on silicon nitride photonic circuits

AU - Terrasanta, Giulio

AU - Müller, Manuel

AU - Sommer, Timo

AU - Althammer, Matthias

AU - Poot, Menno

PY - 2021

Y1 - 2021

N2 - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.

AB - We demonstrate sputtering of high-quality aluminum nitride films onto prefabricated silicon nitride photonic circuits, simplifying their nanofabrication. Hybrid microring devices show reduced bending loss and low propagation losses, enabling future on-chip quantum optics experiments.

UR - https://www.scopus.com/pages/publications/85120090814

M3 - Conference article

AN - SCOPUS:85120090814

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - SF2A.2

T2 - CLEO: Science and Innovations, CLEO:S and I 2021 - Part of Conference on Lasers and Electro-Optics, CLEO 2021

Y2 - 9 May 2021 through 14 May 2021

ER -

Hybrid aluminum nitride integration on silicon nitride photonic circuits

Abstract

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