Grazing incidence small-angle x-ray scattering study of buried and free-standing SiGe islands in a SiGe/Si superlattice

Keyphrases

• SiGe 100%
• Grazing-incidence Wide-angle X-ray Scattering (GIWAXS) 100%
• Superlattice 100%
• SiGe Islands 100%
• Autocorrelation 50%
• Correlation Properties 50%
• Atomic Force Microscopy 50%
• Penetration Depth 50%
• Scattering Geometry 50%
• Distorted Wave Born Approximation 50%
• Reciprocal Space Mapping 50%
• Simulation-based 50%

Physics

• Superlattice 100%
• Grazing Incidence 100%
• Image Analysis 50%
• Born Approximation 50%
• Measurement Method 50%
• Atomic Force Microscopy 50%
• Autocorrelation 50%

Material Science

• Superlattice 100%
• Surface (Surface Science) 100%
• Atomic Force Microscopy 50%