Fluidic integration of equipment in cleanrooms

The continuous inflow of clean air in a work environment does not guarantee contaminant-free processing because particles can become 'entrained' as air is redirected by equipment and product. Flowing air encounters resistance due to equipment, wafers, and/or cassettes. The movement of air around these obstructions results in a wake similar to that left by a boat passing through water, but in three dimensions. It is pointed out that fluidic integration of cleanroom equipment can be a decisive factor in reducing contamination to the levels required for future production. New equipment designs need to be rapidly introduced into the market, but intensive experimentation in the conceptual phase of equipment design is impractical. Fortunately, computational fluid flow simulations can be used in the early stages of design.